Born as a side product of the semi-conductor industry, MEMS devices integrate both electronic and mechanical components onto a single substrate. Sensors, such as accelerometers, comprise the majority of existing commercial microdevices. The reason for their early success arises from the mechanical and electrical integration, as a microsensor can translate physical phenomena into electrical signals all within a single electronic chip. However, the numerous advantages imparted by the size scale offers great potential outside the realm of sensors. For example, in the realm of fluids microdevices can control the flow at a very local scale resulting in more efficient devices, a fact Massachusetts Institute of Technology is trying to exploit by developing a microengine. With the electronics industry possessing half a century of experience using silicon, most mechanical MEMS components are formed from polysilicon using the same technology developed to make transistors. However, a number of other materials are also employed including Silicon Nitride, Silicon Germanium, electroplated Nickel, Amorphous Diamond, and Silicon Carbide as used for the turbine blades in the engine mentioned earlier. The Microsample Laboratory at Johns Hopkins University conducts testing on these materials to determine the basic material properties, including the Young's Modulus, the failure strength, and the coefficient of thermal expansion. Due to the higher surface area to volume ratio, unique manufacturing process, and greater influence from grain size and orientation, micron sized materials behave completely different when compared to their bulk relatives. For example, the strength of polysilicon, roughly 1 GPa at room temperature, far exceeds the ultimate strength of bulk steel (~ 0.5 GPa), with silicon nitride approaching 7 GPa. The space industry provides ample opportunities for microstructures. For instance, a next generation telescope could employ an array of thousands of individually controlled micron-sized mirrors to allow for precse light gathering and focusing. The figure, from Sandia National Laboratory, shows a hinged mirror oriented by a series of comb drives.
However, little research exists on how MEMS materials will react to the space environment, under extreme thermal fluctuations, intense UV and high energy radiation, and, near the Earth, atomic oxygen. Part of this research can be conducted by simulating the conditions on the ground. Research conducted by Sharpe, Eby, and Coles, at Johns Hopkins has established the mechanical property variation for polysilicon between 0° and 250° C. [7]
Figure 7: Failure Strength of Polysilicon
A space-based experiment would complement the ongoing tests providing more reliable material properties for designers to work with. An optimal mission would expose separate material samples to different space environments and for a different duration depending on the particular application. This proposed mission would examine three material scenarios. First, a low altitude, short duration exposure, designed to simulate a pass though the upper atmosphere by a MEMS device. For example, a micro-rocket motor will operate for a short period as it lifts its payload through the upper atmosphere. Atomic oxygen degradation serves as the primary hazard in this stage. Second, a middle altitude, clear of the atmosphere, for a moderate duration, designed to simulate the exposure received by MEMS device on a short space mission. The space shuttle, for instance, stays aloft for only a few days and operates in a low altitude orbit. Thermal cycling, and high-energy radiation play prominent roles for the second stage. Finally, a longer exposure at a higher altitude designed to test the response of the materials to the environment typical to low earth orbiting satellites. For a longer duration higher altitude orbit, other environmental factors arise beyond those mentioned for stage two, such as micrometeorites.
Several methods exist to conduct the experiment. The space shuttle or International Space Station could carry out the tests, but forcing either to change altitude twice for this small experiment would prove a very costly option. Alternatively, a small satellite, deployed at the upper test altitude, could maneuver to the other test altitudes while also controlling the sample exposure. Released from the shuttle or riding piggyback on another satellite deployment mission operating near the top altitude appears possible. Since the samples require testing back on Earth after the exposure, this option also requires a method to recover the satellite. A full-scale satellite with a propulsion system capable of executing multiple orbital changes, and returning to the shuttle or Earth would be prohibitively expensive for a university research project. However, employing a space tether alters this cost equation dramatically. A short space tether, taking advantage of the induced electrodynamic drag, could rapidly move the satellite to the lower two test altitudes. Removing the thrusters, fuel, and related components results in an extremely simple satellite, composed of the following components.